Semi. Global Sourcing Provider
As an innovative supplier, we are committed to providing high-quality, cost-saving semiconductor equipment, materials and consumable through collaboration with customers and global partners.
Chemical,Photo,CMP
Stock Slurry |
Rinse Slurry |
High Purity Graphite felt Tech.
Carbon based insulation is made from organic fiber precursor through needling process, carbonized and graphitized (sometimes purified). It is to be used in vacuum or international gas protected environment.
Typical Properties
| Item | Unit | GSP | GSI |
|---|---|---|---|
| Density | g/cm2 | 0.085 | 0.08-0.1 |
| Carbon | % | ≥99% | ≥99% |
| Thickness | mm | 5 & 10 | 5 & 10 |
| Width | mm | 1,200-1,400 | 1,200-1,400 |
| Length | M | 10-18 | 10-18 |
| Impurity | ppm | ≤200 | ≤600 |
| Max Temp | C | 2,500 inert gas atmosphere | |
Typical Properties
| Item | Unit | GSA | GSF | GSFN |
|---|---|---|---|---|
| Density | g/cm2 | 0.085 | 0.08-0.1 | 0.08-0.1 |
| Carbon | % | ≥99% | ≥99% | ≥99% |
| Thickness | mm | 5/11.5 | 5/10 | 5/10/11.5 |
| Width | mm | 1,200-1,400 | 1,200-1,400 | 1,200-1,400 |
| Length | M | 10-18 | 10-18 | 10-18 |
| Impurity | ppm | ≤20 | ≤50 | ≤20, N<10ppm |
| Max Temp | C | 2,600 inert gas atmosphere | ||
Typical Properties
| Item | Unit | LFB | LFC |
|---|---|---|---|
| Density | g/cm2 | 0.14-0.19 | 0.14-0.19 |
| Carbon | % | ≥99% | ≥99% |
| Flexural Strength | MPa | 0.3+ | 0.3+ |
| Thickness | mm | 40-300 | 20 |
| Width | mm | 1,200-1,400 | X |
| Length | mm | 1,500 | X |
| Diameter | mm | X | Optional |
| Height | mm | X | 1,400 |
| Impurity | ppm | ≤50, ≤20, Optional | |
| Surface treatment | Carbon Cloth, Graphite Foil, Graphite Paint | ||
| Max Temp | C | 2,600 inert gas atmosphere | |
Typical Properties
| Item | Unit | SFCB | SFCC |
|---|---|---|---|
| Density | g/cm2 | 0.13-0.25 | 0.14-0.25 |
| Carbon | % | ≥99% | ≥99% |
| Flexural Strength | MPa | 0.3+ | 0.3+ |
| Compression Strength | MPa | 0.8+ | 0.8+ |
| Thickness | mm | 250 | ≤70 |
| Width | mm | 1,200-1,400 | X |
| Length | mm | 1500 | X |
| Diameter | mm | X | ≤1,650 |
| Height | mm | X | ≤1,200 |
| Impurity | ppm | ≤50, ≤20, Optional | |
| Electrical resistivity-XY | ohm.cm | 0.15 | |
| Electrical resistivity-Z | ohm.cm | 0.85 | |
| Surface treatment | Carbon Cloth, Graphite Foil, Graphite Paint | ||
| Max Temp | C | 2,600 inert gas atmosphere | |
Continuous innovation in filtration and purification technology,
providing comprehensive coverage across the advanced semiconductor industry chain.
| Cobetter Tube | 12 ~24 hours <10ea |
|---|---|
| POR Tube | 168 hours <10ea |
Copyright © 2026 https://kanemarusemi.com All Rights Reserved.
